主题：【原创】中微半导体45纳米蚀刻机 -- 可梦之
共:💬78 🌺221
for 200mm or 300 mm product line?
ICP? RIE? downstream asher? or metal etcher?
For Si, for low k oxide, for high k HfO, for nitride?
fluorine based or chlorine based?
it's for trench etch, bosch etch, via etch...?
too many unknown, hard to tell how big advance it is.
- 相关回复 上下关系8
🙂what type of etcher it is
🙂tsmc的45nm工艺 西潜1号 字176 2009-03-05 06:49:28
🙂随便说一点自己知道的 江淮客 字235 2009-03-04 21:42:32
🙂光刻机还是基础问题 6 财迷心窍 字193 2009-03-03 19:48:22
🙂难道你不知道中国是一个代工大国吗？镜头也一样 河里洗澡的鱼 字45 2009-03-11 20:50:19