五千年(敝帚自珍)

主题:【原创】中微半导体45纳米蚀刻机 -- 可梦之

共:💬78 🌺221
全看分页树展 · 主题 跟帖
家园 what type of etcher it is

for 200mm or 300 mm product line?

ICP? RIE? downstream asher? or metal etcher?

For Si, for low k oxide, for high k HfO, for nitride?

fluorine based or chlorine based?

it's for trench etch, bosch etch, via etch...?

too many unknown, hard to tell how big advance it is.

全看分页树展 · 主题 跟帖


有趣有益,互惠互利;开阔视野,博采众长。
虚拟的网络,真实的人。天南地北客,相逢皆朋友

Copyright © cchere 西西河